High Power Piezo Nano Stepping Drive N-216
Innovating nano positioning with a holding force of up to 800N and a resolution of 5nm.
The N-216 is a piezo stepping actuator with a maximum holding force of 800N and a resolution of 0.03nm (open loop) / 5nm (closed loop). Thanks to its unique PiezoWalk® technology, it enables high-speed and nano-precision positioning while switching between full-step mode and nano-stepping mode. It is suitable for non-magnetic, clean, and vacuum environments, making it ideal for applications that require fine control, such as semiconductor manufacturing, wafer inspection, and nano-lithography.
- Company：ピーアイ・ジャパン
- Price：Other
